Inventor

KARINO ISAMU

JP7 patents

⚠️ This page may combine multiple inventors who share the name “KARINO ISAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MITSUBISHI ELECTRIC CORP

5 patents

US5715052AFeb 3, 1998

Method of detecting the position and the content of fine foreign matter on substrates and analyzers used therefor

MITSUBISHI ELECTRIC CORP58 citations95

US5517027AMay 14, 1996

Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these

MITSUBISHI ELECTRIC CORP55 citations94

US5877035AMar 2, 1999

Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same

MITSUBISHI ELECTRIC CORP29 citations92

US6355495B1Mar 12, 2002

Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof

MITSUBISHI ELECTRIC CORP27 citations90

US5795919AAug 18, 1998

Insulating paints

MITSUBISHI ELECTRIC CORP4 citations54

SEIKO INSTR INC

2 patents

US6255127B1Jul 3, 2001

Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same

SEIKO INSTR INC20 citations92

US6124142ASep 26, 2000

Method for analyzing minute foreign substance elements

SEIKO INSTR INC27 citations92