Inventor
WOODS H FREDERICK
US4 patents
Patents
4 patentsUS6286231B1Sep 11, 2001
Method and apparatus for high-pressure wafer processing and drying
SEMITOOL INC178 citations97
US6357142B1Mar 19, 2002
Method and apparatus for high-pressure wafer processing and drying
SEMITOOL INC43 citations95
US6745494B2Jun 8, 2004
Method and apparatus for processing wafers under pressure
SEMITOOL INC21 citations91
US6543156B2Apr 8, 2003
Method and apparatus for high-pressure wafer processing and drying
SEMITOOL INC14 citations91