Inventor
MITSUNARI TADASHI
JP7 patents
Patents
7 patentsUS11035741B2Jun 15, 2021
Temperature measurement substrate and temperature measurement system
TOKYO ELECTRON LTD0 citations61
US11721557B2Aug 8, 2023
Etching method
TOKYO ELECTRON LTD0 citations60
US10643839B2May 5, 2020
Film forming apparatus and film forming method
TOKYO ELECTRON LTD1 citations60
US12312683B2May 27, 2025
Substrate processing method and substrate processing device
TOKYO ELECTRON LTD0 citations59
US12545994B2Feb 10, 2026
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations57
US12362143B2Jul 15, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations50
US11658008B2May 23, 2023
Film forming apparatus and film forming method
TOKYO ELECTRON LTD0 citations49