Inventor
NORO NAOTAKA
US14 patents
⚠️ This page may combine multiple inventors who share the name “NORO NAOTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS7938080B2May 10, 2011
Method for using film formation apparatus
TOKYO ELECTRON LTD8 citations83
US7727296B2Jun 1, 2010
Collecting unit for semiconductor process
TOKYO ELECTRON LTD17 citations83
US7494943B2Feb 24, 2009
Method for using film formation apparatus
TOKYO ELECTRON LTD10 citations83
US11450512B2Sep 20, 2022
Plasma processing method
TOKYO ELECTRON LTD2 citations72
US10392698B2Aug 27, 2019
Film forming method, film forming system and surface processing method
TOKYO ELECTRON LTD2 citations72
US11081322B2Aug 3, 2021
Film forming apparatus, cleaning method for film forming apparatus and recording medium
TOKYO ELECTRON LTD5 citations70
US11377739B2Jul 5, 2022
Film forming apparatus
TOKYO ELECTRON LTD1 citations61
US11721557B2Aug 8, 2023
Etching method
TOKYO ELECTRON LTD0 citations60
US11981992B2May 14, 2024
Method for forming RuSi film and substrate processing system
TOKYO ELECTRON LTD0 citations51
US10872764B2Dec 22, 2020
Film forming method
TOKYO ELECTRON LTD0 citations51
US10535528B2Jan 14, 2020
Method of forming titanium oxide film and method of forming hard mask
TOKYO ELECTRON LTD0 citations51
US10519548B2Dec 31, 2019
Film forming apparatus
TOKYO ELECTRON LTD0 citations50
US10811264B2Oct 20, 2020
Film-forming method and film-forming apparatus
TOKYO ELECTRON LTD0 citations38