Inventor
SMITS JOSEPHUS JACOBUS
NL9 patents
⚠️ This page may combine multiple inventors who share the name “SMITS JOSEPHUS JACOBUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7612353B2Nov 3, 2009
Lithographic apparatus, contaminant trap, and device manufacturing method
ASML NETHERLANDS BV8 citations79
US7116399B2Oct 3, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations73
US7372058B2May 13, 2008
Ex-situ removal of deposition on an optical element
ASML NETHERLANDS BV8 citations70
US7397056B2Jul 8, 2008
Lithographic apparatus, contaminant trap, and device manufacturing method
ASML NETHERLANDS BV7 citations67
US7767989B2Aug 3, 2010
Ex-situ removal of deposition on an optical element
ASML NETHERLANDS BV1 citations60