Inventor
VAN DER WIJST MARC WILHELMUS M
NL5 patents
Patents
5 patentsUS6788386B2Sep 7, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV75 citations95
US7116399B2Oct 3, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations73
US6977713B2Dec 20, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations72
US7049592B2May 23, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations71
US7471373B2Dec 30, 2008
Lithographic apparatus with patterning device position determination
ASML NETHERLANDS BV3 citations60