Inventor
FRERIKS JOHANNES MARIA
NL5 patents
⚠️ This page may combine multiple inventors who share the name “FRERIKS JOHANNES MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS7247866B2Jul 24, 2007
Contamination barrier with expandable lamellas
ASML NETHERLANDS BV16 citations92
US7504643B2Mar 17, 2009
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
ASML NETHERLANDS BV10 citations83
US7495239B2Feb 24, 2009
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
ASML NETHERLANDS BV8 citations83
US7737425B2Jun 15, 2010
Contamination barrier with expandable lamellas
ASML NETHERLANDS BV5 citations73