Inventor

MCLANE JAMES R

US2 patents

Patents

2 patents

US9026249B2May 5, 2015

Robot calibration method

VARIAN SEMICONDUCTOR EQUIPMENT2 citations59

US7361913B2Apr 22, 2008

Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control

VARIAN SEMICONDUCTOR EQUIPMENT4 citations53