Inventor
CUMMINGS JAMES J
US2 patents
Patents
2 patentsUS7394073B2Jul 1, 2008
Methods and apparatus for ion beam angle measurement in two dimensions
VARIAN SEMICONDUCTOR EQUIPMENT25 citations89
US7361913B2Apr 22, 2008
Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control
VARIAN SEMICONDUCTOR EQUIPMENT4 citations53