Inventor
HASEBE SHIGERU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “HASEBE SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
6 patentsUS7090949B2Aug 15, 2006
Method of manufacturing a photo mask and method of manufacturing a semiconductor device
TOSHIBA KK14 citations84
US7473495B2Jan 6, 2009
Method of creating predictive model, method of managing process steps, method of manufacturing semiconductor device, method of manufacturing photo mask, and computer program product
TOSHIBA KK13 citations83
US6333213B2Dec 25, 2001
Method of forming photomask and method of manufacturing semiconductor device
TOSHIBA KK13 citations67
US7575835B2Aug 18, 2009
Exposure method, exposure quantity calculating system using the exposure method and semiconductor device manufacturing method using the exposure method
TOSHIBA KK0 citations51
US7118834B2Oct 10, 2006
Exposure method, exposure quantity calculating system using the exposure method and semiconductor device manufacturing method using the exposure method
TOSHIBA KK0 citations51
US7446852B2Nov 4, 2008
Projection exposure mask acceptance decision system, projection exposure mask acceptance decision method, method for manufacturing semiconductor device, and computer program project
TOSHIBA KK1 citations50