Inventor
XIA XINYUA
US4 patents
⚠️ This page may combine multiple inventors who share the name “XIA XINYUA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7208425B2Apr 24, 2007
Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill
APPLIED MATERIALS INC15 citations92
US6905940B2Jun 14, 2005
Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill
APPLIED MATERIALS INC30 citations92
US7459405B2Dec 2, 2008
Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill
APPLIED MATERIALS INC2 citations62