Inventor
COOPER EMANUEL
US12 patents
⚠️ This page may combine multiple inventors who share the name “COOPER EMANUEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
3 patentsUS8026200B2Sep 27, 2011
Low pH mixtures for the removal of high density implanted resist
ADVANCED TECH MATERIALS19 citations91
USRE46427EJun 6, 2017
Antioxidants for post-CMP cleaning formulations
ADVANCED TECH MATERIALS2 citations71
US9528078B2Dec 27, 2016
Antioxidants for post-CMP cleaning formulations
ADVANCED TECH MATERIALS4 citations71
ENTEGRIS INC
3 patentsUS10651045B2May 12, 2020
Compositions and methods for etching silicon nitride-containing substrates
ENTEGRIS INC3 citations68
US11781066B2Oct 10, 2023
Wet etching composition and method
ENTEGRIS INC0 citations62
US10340150B2Jul 2, 2019
Ni:NiGe:Ge selective etch formulations and method of using same
ENTEGRIS INC0 citations38