Inventor
OKUDA JIRO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “OKUDA JIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
3 patentsUS9607844B2Mar 28, 2017
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD3 citations70
US11670523B2Jun 6, 2023
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations50
US11569104B2Jan 31, 2023
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50