Inventor
FUNAZAKI KAZUNORI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “FUNAZAKI KAZUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS9418822B2Aug 16, 2016
Plasma processing apparatus, plasma processing method and high frequency generator
TOKYO ELECTRON LTD29 citations93
US10109463B2Oct 23, 2018
Microwave automatic matcher and plasma processing apparatus
TOKYO ELECTRON LTD3 citations72
US10074524B2Sep 11, 2018
Plasma processing apparatus and high frequency generator
TOKYO ELECTRON LTD2 citations72
US9159536B2Oct 13, 2015
Plasma processing apparatus, abnormal oscillation determination method and high-frequency generator
TOKYO ELECTRON LTD2 citations58
US9373483B2Jun 21, 2016
Plasma processing apparatus and high frequency generator
TOKYO ELECTRON LTD1 citations51
US9977070B2May 22, 2018
Method for inspecting magnetron
TOKYO ELECTRON LTD0 citations41
US10510513B2Dec 17, 2019
Plasma processing device and high-frequency generator
TOKYO ELECTRON LTD0 citations40