Inventor

AGARWAL RAJIV KRISHAN

US5 patents

⚠️ This page may combine multiple inventors who share the name “AGARWAL RAJIV KRISHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AIR PROD & CHEM

4 patents

US9284198B2Mar 15, 2016

Process for making trisilylamine

AIR PROD & CHEM5 citations78

US9976111B2May 22, 2018

TiN hard mask and etch residual removal

AIR PROD & CHEM5 citations72

US10073351B2Sep 11, 2018

Semi-aqueous photoresist or semiconductor manufacturing residue stripping and cleaning composition with improved silicon passivation

AIR PROD & CHEM1 citations49

US9463978B2Oct 11, 2016

Process for making trisilylamine

AIR PROD & CHEM0 citations46

VERSUM MAT US LLC

1 patent

US10711227B2Jul 14, 2020

TiN hard mask and etch residue removal

VERSUM MAT US LLC0 citations51