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Inventor
HENDRIX BRYAN CLARK
US
2 patents
Patents
2 patents
US10453744B2
Oct 22, 2019
Low temperature molybdenum film deposition utilizing boron nucleation layers
ENTEGRIS INC
1 citations
54
US10872770B2
Dec 22, 2020
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobalt
ENTEGRIS INC
0 citations
44