Inventor
DOERING DIRK
DE11 patents
⚠️ This page may combine multiple inventors who share the name “DOERING DIRK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL AG
3 patentsUS9904060B2Feb 27, 2018
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
ZEISS CARL AG5 citations82
US10168539B2Jan 1, 2019
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
ZEISS CARL AG3 citations71
US10578881B2Mar 3, 2020
Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
ZEISS CARL AG0 citations50