P

Inventor

BOYD JOHN

CA51 patents
⚠️ This page may combine multiple inventors who share the name “BOYD JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

26 patents
US7367345B1May 6, 2008

Apparatus and method for providing a confined liquid for immersion lithography

LAM RES CORP62 citations98
US7615480B2Nov 10, 2009

Methods of post-contact back end of the line through-hole via integration

LAM RES CORP22 citations93
US7153400B2Dec 26, 2006

Apparatus and method for depositing and planarizing thin films of semiconductor wafers

LAM RES CORP33 citations93
US6864181B2Mar 8, 2005

Method and apparatus to form a planarized Cu interconnect layer using electroless membrane deposition

LAM RES CORP19 citations93
US6607425B1Aug 19, 2003

Pressurized membrane platen design for improving performance in CMP applications

LAM RES CORP31 citations90
US6475332B1Nov 5, 2002

Interlocking chemical mechanical polishing system

LAM RES CORP44 citations89
US7749689B2Jul 6, 2010

Methods for providing a confined liquid for immersion lithography

LAM RES CORP13 citations84
US7691278B2Apr 6, 2010

Apparatus for the removal of a fluorinated polymer from a substrate and methods therefor

LAM RES CORP6 citations74
US7563348B2Jul 21, 2009

Electroplating head and method for operating the same

LAM RES CORP7 citations73
US6995067B2Feb 7, 2006

Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency

LAM RES CORP10 citations73
US6913521B2Jul 5, 2005

Methods using active retainer rings for improving edge performance in CMP applications

LAM RES CORP5 citations71
US6776695B2Aug 17, 2004

Platen design for improving edge performance in CMP applications

LAM RES CORP11 citations71
US7947157B2May 24, 2011

Apparatus and method for depositing and planarizing thin films of semiconductor wafers

LAM RES CORP5 citations63
US7749893B2Jul 6, 2010

Methods and systems for low interfacial oxide contact between barrier and copper metallization

LAM RES CORP3 citations63
US7048608B2May 23, 2006

Semiconductor wafer material removal apparatus and method for operating the same

LAM RES CORP2 citations63
US7875554B2Jan 25, 2011

Method for electroless depositing a material on a surface of a wafer

LAM RES CORP1 citations62
US7709400B2May 4, 2010

Thermal methods for cleaning post-CMP wafers

LAM RES CORP2 citations62
US7592259B2Sep 22, 2009

Methods and systems for barrier layer surface passivation

LAM RES CORP4 citations62
US8053355B2Nov 8, 2011

Methods and systems for low interfacial oxide contact between barrier and copper metallization

LAM RES CORP0 citations52
US7909934B2Mar 22, 2011

Megasonic cleaning efficiency using auto-tuning of a RF generator at constant maximum efficiency

LAM RES CORP0 citations52
US8048283B2Nov 1, 2011

Method and apparatus for plating semiconductor wafers

LAM RES CORP0 citations51
US7884017B2Feb 8, 2011

Thermal methods for cleaning post-CMP wafers

LAM RES CORP0 citations51
US7704367B2Apr 27, 2010

Method and apparatus for plating semiconductor wafers

LAM RES CORP0 citations51
US7582565B2Sep 1, 2009

Method and apparatus for semiconductor wafer planarization

LAM RES CORP0 citations51
US7368017B2May 6, 2008

Method and apparatus for semiconductor wafer planarization

LAM RES CORP0 citations51
US7358186B2Apr 15, 2008

Method and apparatus for material deposition in semiconductor fabrication

LAM RES CORP1 citations51

BOYD JOHN

8 patents

DORDI YEZDI

6 patents

COCA COLA CO

4 patents

VIGNETTE CORP

2 patents

YOON HYUNGSUK ALEXANDER

2 patents

ADVANCED MATERIALS SCIENCES IN

1 patent

HANCOCK ROBERT E W

1 patent

Showing the top 50 of 51 patents by PatentIndex Score.