Inventor
KUWADA HIROTAKA
JP3 patents
Patents
3 patentsUS11732357B2Aug 22, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US11499225B2Nov 15, 2022
Gas processing apparatus and gas processing method
TOKYO ELECTRON LTD0 citations47
US11248293B2Feb 15, 2022
Film-forming apparatus and film-forming method
TOKYO ELECTRON LTD0 citations46