P

Inventor

NAKAYAMA YASUHIKO

JP31 patents
⚠️ This page may combine multiple inventors who share the name “NAKAYAMA YASUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

13 patents
US5774222AJun 30, 1998

Manufacturing method of semiconductor substrative and method and apparatus for inspecting defects of patterns on an object to be inspected

HITACHI LTD167 citations99
US6169282B1Jan 2, 2001

Defect inspection method and apparatus therefor

HITACHI LTD107 citations98
US6091075AJul 18, 2000

Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus

HITACHI LTD99 citations98
US5677755AOct 14, 1997

Method and apparatus for pattern exposure, mask used therefor, and semiconductor integrated circuit produced by using them

HITACHI LTD147 citations97
US6404498B1Jun 11, 2002

Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected

HITACHI LTD38 citations96
US6263099B1Jul 17, 2001

Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected

HITACHI LTD56 citations96
US7221486B2May 22, 2007

Method and apparatus for picking up 2D image of an object to be sensed

HITACHI LTD33 citations93
US6674890B2Jan 6, 2004

Defect inspection method and apparatus therefor

HITACHI LTD41 citations93
US6507417B1Jan 14, 2003

Method and apparatus for picking up 2D image of an object to be sensed

HITACHI LTD23 citations93
US5747201AMay 5, 1998

Controlling method of forming thin film, system for said controlling method, exposure method and system for said exposure method

HITACHI LTD28 citations92
US5409538AApr 25, 1995

Controlling method of forming thin film, system for said controlling method, exposure method and system for said exposure method

HITACHI LTD26 citations92
US5134298AJul 28, 1992

Beam control method and apparatus

HITACHI LTD29 citations92
US5324953AJun 28, 1994

Reduced-projection exposure system with chromatic aberration correction system including diffractive lens such as holographic lens

HITACHI LTD4 citations63

CHINON IND INC

8 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

4 patents

RENESAS TECH CORP

3 patents

SINTAI OPTICAL SHENZHEN CO LTD

1 patent

SYSTEM ENGINEERS CO LTD

1 patent

KANKYO SEMI CONDUCTORS

1 patent