Inventor
WHITEHAIR STANLEY J
US7 patents
Patents
7 patentsUS5541567AJul 30, 1996
Coaxial vias in an electronic substrate
IBM163 citations98
US5536921AJul 16, 1996
System for applying microware energy in processing sheet like materials
IBM140 citations98
US5280154AJan 18, 1994
Radio frequency induction plasma processing system utilizing a uniform field coil
IBM236 citations98
US5298720AMar 29, 1994
Method and apparatus for contamination control in processing apparatus containing voltage driven electrode
IBM53 citations95
US5225926AJul 6, 1993
Durable optical elements fabricated from free standing polycrystalline diamond and non-hydrogenated amorphous diamond like carbon (dlc) thin films
IBM98 citations94
US5241040AAug 31, 1993
Microwave processing
IBM32 citations92
US5340914AAug 23, 1994
Microwave processing
IBM5 citations73