Inventor
MASSOUD HISHAM Z
US2 patents
Patents
2 patentsUS5313044AMay 17, 1994
Method and apparatus for real-time wafer temperature and thin film growth measurement and control in a lamp-heated rapid thermal processor
UNIV DUKE78 citations91
US7286389B2Oct 23, 2007
Low-power, p-channel enhancement-type metal-oxide semiconductor field-effect transistor (PMOSFET) SRAM cells
UNIV DUKE0 citations47