Inventor
KOSHISHIBA HIROYA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KOSHISHIBA HIROYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
10 patentsUS5629969AMay 13, 1997
X-ray imaging system
HITACHI LTD65 citations95
US5051585ASep 24, 1991
Apparatus and method of pattern detection based on a scanning transmission electron microscope
HITACHI LTD73 citations95
US6507029B1Jan 14, 2003
Sample processing apparatus and method for removing charge on sample through light irradiation
HITACHI LTD20 citations92
US5015097AMay 14, 1991
Method for inspecting filled state of via-holes filled with fillers and apparatus for carrying out the method
HITACHI LTD28 citations92
US4814615AMar 21, 1989
Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure
HITACHI LTD31 citations92
US5763123AJun 9, 1998
Method for producing thin-film substrate
HITACHI LTD27 citations91
US5351278ASep 27, 1994
X-ray tomography method and apparatus thereof
HITACHI LTD73 citations91
US4990776AFeb 5, 1991
Electron microscope
HITACHI LTD47 citations91
US6831998B1Dec 14, 2004
Inspection system for circuit patterns and a method thereof
HITACHI LTD26 citations90
US6072899AJun 6, 2000
Method and device of inspecting three-dimensional shape defect
HITACHI LTD32 citations90