Inventor
MAKIHIRA HIROSHI
JP18 patents
Patents
18 patentsUS6169282B1Jan 2, 2001
Defect inspection method and apparatus therefor
HITACHI LTD107 citations98
US5649022AJul 15, 1997
Pattern checking method and checking apparatus
HITACHI LTD79 citations96
US5430548AJul 4, 1995
Method and apparatus for pattern detection
HITACHI LTD70 citations96
US5153444AOct 6, 1992
Method and apparatus for detecting patterns
HITACHI LTD92 citations96
US4791586ADec 13, 1988
Method of and apparatus for checking geometry of multi-layer patterns for IC structures
HITACHI LTD99 citations96
US4725722AFeb 16, 1988
Automatic focusing method and apparatus utilizing contrasts of projected pattern
HITACHI LTD57 citations96
US4343553AAug 10, 1982
Shape testing apparatus
HITACHI LTD57 citations96
US4410278AOct 18, 1983
Method and apparatus for appearance inspection
HITACHI LTD79 citations95
US4403294ASep 6, 1983
Surface defect inspection system
HITACHI LTD61 citations95
US7221486B2May 22, 2007
Method and apparatus for picking up 2D image of an object to be sensed
HITACHI LTD33 citations93
US6674890B2Jan 6, 2004
Defect inspection method and apparatus therefor
HITACHI LTD41 citations93
US6507417B1Jan 14, 2003
Method and apparatus for picking up 2D image of an object to be sensed
HITACHI LTD23 citations93
US4614430ASep 30, 1986
Method of detecting pattern defect and its apparatus
HITACHI LTD40 citations92
US4226539AOct 7, 1980
Cylindrical body appearance inspection apparatus
HITACHI LTD57 citations92
US4213117AJul 15, 1980
Method and apparatus for detecting positions of chips on a semiconductor wafer
HITACHI LTD49 citations92
US4472056ASep 18, 1984
Shape detecting apparatus
HITACHI LTD48 citations91
US6317512B1Nov 13, 2001
Pattern checking method and checking apparatus
HITACHI LTD16 citations84
US4556797ADec 3, 1985
Method and apparatus for detecting edge of fine pattern on specimen
HITACHI LTD11 citations74