Inventor
SUN JAMES J
US11 patents
Patents
11 patentsUS6409839B1Jun 25, 2002
Method and apparatus for vapor generation and film deposition
MSP CORP91 citations97
US6349668B1Feb 26, 2002
Method and apparatus for thin film deposition on large area substrates
MSP CORP118 citations97
US6221136B1Apr 24, 2001
Compact electrostatic precipitator for droplet aerosol collection
MSP CORP100 citations97
US5940175AAug 17, 1999
Method and apparatus for surface inspection in a chamber
MSP CORP104 citations97
US6607597B2Aug 19, 2003
Method and apparatus for deposition of particles on surfaces
MSP CORP54 citations96
US6527821B2Mar 4, 2003
Automatic condensed oil remover
MSP CORP49 citations96
US5916640AJun 29, 1999
Method and apparatus for controlled particle deposition on surfaces
MSP CORP58 citations96
US6364941B2Apr 2, 2002
Compact high efficiency electrostatic precipitator for droplet aerosol collection
MSP CORP33 citations92
US6746539B2Jun 8, 2004
Scanning deposition head for depositing particles on a wafer
MSP CORP17 citations84
US6805907B2Oct 19, 2004
Method and apparatus for vapor generation and film deposition
MSP CORP6 citations73
US6601777B2Aug 5, 2003
Suspended particle container for an atomizer
MSP CORP12 citations73