Inventor
TOYOMAKI TOSHIAKI
JP12 patents
Patents
12 patentsUS9760023B2Sep 12, 2017
Substrate carrying device
TOKYO ELECTRON LTD8 citations81
US11735448B2Aug 22, 2023
Container, container partition plate, substrate processing system, and substrate transfer method
TOKYO ELECTRON LTD2 citations70
US12191188B2Jan 7, 2025
Transfer device, transfer system, and end effector
TOKYO ELECTRON LTD1 citations61
US11705355B2Jul 18, 2023
Substrate transfer system and atmospheric transfer module
TOKYO ELECTRON LTD0 citations61
US11227785B2Jan 18, 2022
Substrate transfer system and atmospheric transfer module
TOKYO ELECTRON LTD0 citations61
US12030179B2Jul 9, 2024
Teaching method of transfer device and processing system
TOKYO ELECTRON LTD1 citations60
US11923232B2Mar 5, 2024
Positioning apparatus, processing system, and positioning method
TOKYO ELECTRON LTD0 citations60
US11631607B2Apr 18, 2023
Carrier and jig
TOKYO ELECTRON LTD1 citations60
US12131937B2Oct 29, 2024
Transfer system, transfer device, and transfer method
TOKYO ELECTRON LTD0 citations50
US12444632B2Oct 14, 2025
System of processing substrate, transfer method, transfer program, and holder
TOKYO ELECTRON LTD0 citations49
US11721564B2Aug 8, 2023
Substrate processing system and substrate transfer apparatus and method
TOKYO ELECTRON LTD0 citations49
US10133266B2Nov 20, 2018
Conveyance robot replacement apparatus and conveyance robot replacement method
TOKYO ELECTRON LTD1 citations48