Inventor

AMIYA MICHITAKA

JP2 patents

⚠️ This page may combine multiple inventors who share the name “AMIYA MICHITAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US10276408B2Apr 30, 2019

Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system

TOKYO ELECTRON LTD2 citations70

AMIYA MICHITAKA

1 patent

US8820335B2Sep 2, 2014

Cleaning apparatus, substrate processing system, cleaning method, program and storage medium

AMIYA MICHITAKA1 citations39