Inventor
CHUNG YOUNG DAE
KR13 patents
Patents
13 patentsUS11923213B2Mar 5, 2024
Substrate heating unit, substrate processing apparatus, and substrate processing method
SEMES CO LTD3 citations72
US12224200B2Feb 11, 2025
Substrate treating apparatus
SEMES CO LTD1 citations62
US12560862B2Feb 24, 2026
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations61
US12381084B2Aug 5, 2025
Apparatus and method for treating substrate
SEMES CO LTD0 citations61
US12381097B2Aug 5, 2025
Substrate treating apparatus
SEMES CO LTD0 citations60
US12094733B2Sep 17, 2024
Substrate treatment apparatus
SEMES CO LTD0 citations60
US12553138B2Feb 17, 2026
Apparatus and method of processing substrate
SEMES CO LTD0 citations59
US11495467B2Nov 8, 2022
Method and apparatus for etching thin layer
SEMES CO LTD1 citations59
US12550661B2Feb 10, 2026
Apparatus for treating substrate
SEMES CO LTD0 citations50
US12525474B2Jan 13, 2026
Apparatus for treating substrate and method for treating substrate
SEMES CO LTD0 citations50
US12148674B2Nov 19, 2024
Substrate processing control using a measured size distribution of by-product particles
SEMES CO LTD0 citations49
US12055857B2Aug 6, 2024
Mask processing apparatus and substrate processing apparatus
SEMES CO LTD0 citations47
US11715651B2Aug 1, 2023
Apparatus for and method of treating substrate
SEMES CO LTD0 citations47