Inventor · disambiguated record
Yasukazu Mukogawa
Also filed as: MUKOGAWA YASUKAZU
11 granted patents·275 citations·filing 1984–2001
92Inventor score
Top patents by PatentIndex Score
11 records- 0180US5844850AApparatus for analyzing a failure in a semiconductor wafer and method thereofMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Dec 1, 1998·70 cites·8 claims
- 0271US6009545ASystem for analyzing a failure in a semiconductor wafer by calculating correlation coefficient between collated data of defects per prescribed unit and failures per prescribed unitMITSUBISHI ELECTRIC CORP·Filed 1998·Granted Dec 28, 1999·45 cites·9 claims
- 0370US6733661B2Ultrapure water producing apparatusRENESAS TECH CORP·Filed 2001·Granted May 11, 2004·13 cites·4 claims
- 0469US4765963AApparatus for measuring impurities in waterMITSUBISHI ELECTRIC CORP·Filed 1986·Granted Aug 23, 1988·28 cites·2 claims
- 0564US5876819ACrystal orientation detectable semiconductor substrate, and methods of manufacturing and using the sameMITSUBISHI ELECTRIC CORP·Filed 1995·Granted Mar 2, 1999·32 cites·9 claims
- 0664US5511569ACleaning apparatusMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Apr 30, 1996·36 cites·12 claims
- 0759US4786473AApparatus for measuring impurities in pure waterMITSUBISHI ELECTRIC CORP·Filed 1986·Granted Nov 22, 1988·20 cites·6 claims
- 0844US5331193ASemiconductor device resistant to slip line formationMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Jul 19, 1994·10 cites·7 claims
- 0942US5942763AApparatus and method for identifying an identification mark of a waferMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Aug 24, 1999·10 cites·13 claims
- 1039US5928786AMonocrystalline silicon wafer and method of thermally oxidizing a surface thereofMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Jul 27, 1999·7 cites·11 claims
- 1135US4569224ADevice for measuring the absolute value of the density of salts in atmosphereMITSUBISHI ELECTRIC CORP·Filed 1984·Granted Feb 11, 1986·4 cites·1 claims
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