Inventor

ZAJAC JOHN P

US3 patents

Patents

3 patents

US4958658ASep 25, 1990

Mass flow stabilized

TEGAL CORP47 citations86

US4539062ASep 3, 1985

Modular plasma reactor with local atmosphere

TEGAL CORP7 citations68

US4547248AOct 15, 1985

Automatic shutoff valve

TEGAL CORP1 citations48