Inventor

OOSTERLAKEN THEODORUS G M

NL34 patents

⚠️ This page may combine multiple inventors who share the name “OOSTERLAKEN THEODORUS G M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OOSTERLAKEN THEODORUS G M

ASM IP HOLDING BV

Wafer boat

Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicals

Modular vertical furnace processing system

Method and system for delivering hydrogen peroxide to a semiconductor processing chamber

Process for forming silicon-filled openings with a reduced occurrence of voids

Fast FOUP swapping with a FOUP handler

Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace

Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas

Semiconductor processing assembly and facility

Fast FOUP swapping with a FOUP handler

Apparatus and method to process wafers

Automatic system calibration for wafer handling

Apparatus for processing a plurality of substrates provided with an extractor chamber

Flange and apparatus for processing substrates

Injector

Batch furnace assembly and method of operating a batch furnace assembly

Vertical batch furnace assembly

Process for forming silicon-filled openings with a reduced occurrence of voids

Reactive curing process for semiconductor substrates

Wafer boat handling device, vertical batch furnace and method

Dual model-based temperature controller

Substrate processing apparatus, reactor mover for moving a reactor of the apparatus and method of maintaining the reactor of the apparatus

Wafer boat

Wafer processing apparatus with a rotatable table

Assembly of liner and flange for vertical furnace as well as a vertical process furnace

Cassette lid opening device

ASM INT

Delivery of vapor precursor from solid source

Method and apparatus for processing semiconductor substrates

Method and apparatus for processing semiconductor substrates

OOSTERLAKEN THEODORUS G M

Modular semiconductor processing system

Semiconductor processing apparatus including a plurality of reactors, and method for providing the same with process gas

DE RIDDER CHRIS G M

Wafer processing apparatus with heated, rotating substrate support

ASM INT NV

Dummy wafer storage cassette

ASM IP HOLDING B V

Wafer boat system, holder ring and use thereof