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Inventor
GANANI CHAGGAI SHMUEL
NL
2 patents
Patents
2 patents
US12412759B2
Sep 9, 2025
Substrate processing apparatus, reactor mover for moving a reactor of the apparatus and method of maintaining the reactor of the apparatus
ASM IP HOLDING BV
0 citations
44
US12237195B2
Feb 25, 2025
Cassette lid opening device
ASM IP HOLDING BV
0 citations
38