Inventor
PENG HSIN-TANG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “PENG HSIN-TANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOSEL VITELIC INC
3 patentsUS6492263B1Dec 10, 2002
Dual damascene process which prevents diffusion of metals and improves trench-to-via alignment
MOSEL VITELIC INC50 citations89
US6128070AOct 3, 2000
Monitor method and apparatus for overlay alignment of a stepper
MOSEL VITELIC INC29 citations89
US6245467B1Jun 12, 2001
Patterned mask and a deep trench capacitor formed thereby
MOSEL VITELIC INC4 citations60