Inventor
OGINO SATOSHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “OGINO SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
4 patentsUS6232209B1May 15, 2001
Semiconductor device and manufacturing method thereof
MITSUBISHI ELECTRIC CORP58 citations93
US6656849B2Dec 2, 2003
Plasma reactor
MITSUBISHI ELECTRIC CORP22 citations91
US6156152ADec 5, 2000
Plasma processing apparatus
MITSUBISHI ELECTRIC CORP45 citations91
US6471821B2Oct 29, 2002
Plasma reactor and method
MITSUBISHI ELECTRIC CORP8 citations72