Inventor
YOSHIHARA KOSUKE
JP16 patents
⚠️ This page may combine multiple inventors who share the name “YOSHIHARA KOSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS6004047ADec 21, 1999
Method of and apparatus for processing photoresist, method of evaluating photoresist film, and processing apparatus using the evaluation method
TOKYO ELECTRON LTD127 citations98
US6281145B1Aug 28, 2001
Apparatus and method for applying process solution
TOKYO ELECTRON LTD62 citations95
US6117486ASep 12, 2000
Photoresist coating method and apparatus
TOKYO ELECTRON LTD76 citations95
US5689749ANov 18, 1997
Apparatus for developing a resist-coated substrate
TOKYO ELECTRON LTD68 citations94
US6620244B2Sep 16, 2003
Resist film forming method and resist coating apparatus
TOKYO ELECTRON LTD18 citations92
US6410194B1Jun 25, 2002
Resist film forming method and resist coating apparatus
TOKYO ELECTRON LTD21 citations92
US5826130AOct 20, 1998
Apparatus and method for developing resist coated on substrate
TOKYO ELECTRON LTD29 citations90
US6821550B2Nov 23, 2004
Apparatus and method for applying process solution
TOKYO ELECTRON LTD16 citations83
US11065639B2Jul 20, 2021
Coating treatment method, computer storage medium and coating treatment apparatus
TOKYO ELECTRON LTD2 citations72
US11407005B2Aug 9, 2022
Coating method, coating apparatus and recording medium
TOKYO ELECTRON LTD2 citations70
US11693319B2Jul 4, 2023
Substrate processing method, substrate processing apparatus, and storage medium
TOKYO ELECTRON LTD1 citations62
US11938511B2Mar 26, 2024
Coating method, coating apparatus and recording medium
TOKYO ELECTRON LTD0 citations59
US12216406B2Feb 4, 2025
Coating method and coating apparatus
TOKYO ELECTRON LTD0 citations49