Inventor
HILTAWSKI KNUT
DE5 patents
Patents
5 patentsUS6962471B2Nov 8, 2005
Substrate conveying module and system made up of substrate conveying module and workstation
LEICA MICROSYSTEMS44 citations90
US7028565B2Apr 18, 2006
Method and arrangement for transporting and inspecting semiconductor substrates
LEICA MICROSYSTEMS6 citations71
US6553850B2Apr 29, 2003
Method and arrangement for transporting and inspecting semiconductor substrates
LEICA MICROSYSTEMS1 citations60
US6845174B2Jan 18, 2005
Arrangement and method for the identification of substrates
LEICA MICROSYSTEMS4 citations57
US6789436B2Sep 14, 2004
Method and arrangement for transporting and inspecting semiconductor substrates
LEICA MICROSYSTEMS0 citations49