Inventor
LIN YEOU-MING
TW4 patents
Patents
4 patentsUS7071066B2Jul 4, 2006
Method and structure for forming high-k gates
TAIWAN SEMICONDUCTOR MFG46 citations92
US6573193B2Jun 3, 2003
Ozone-enhanced oxidation for high-k dielectric semiconductor devices
TAIWAN SEMICONDUCTOR MFG34 citations91
US6753224B1Jun 22, 2004
Layer of high-k inter-poly dielectric
TAIWAN SEMICONDUCTOR MFG36 citations90
US6764927B1Jul 20, 2004
Chemical vapor deposition (CVD) method employing wetting pre-treatment
TAIWAN SEMICONDUCTOR MFG9 citations72