Inventor
HAMA MANABU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “HAMA MANABU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS7867926B2Jan 11, 2011
Substrate processing apparatus and method
TOKYO ELECTRON LTD137 citations97
US6808566B2Oct 26, 2004
Reduced-pressure drying unit and coating film forming method
TOKYO ELECTRON LTD20 citations91
US7195936B2Mar 27, 2007
Thin film processing method and system
TOKYO ELECTRON LTD4 citations62
US7534467B2May 19, 2009
Reduced-pressure drying unit and coating film forming method
TOKYO ELECTRON LTD5 citations61
US6903800B2Jun 7, 2005
Film-processing method and film-processing apparatus
TOKYO ELECTRON LTD6 citations61