Inventor
BAUCH LOTHAR
DE6 patents
⚠️ This page may combine multiple inventors who share the name “BAUCH LOTHAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
4 patentsUS6737748B2May 18, 2004
Stacked via with specially designed landing pad for integrated semiconductor structures
INFINEON TECHNOLOGIES AG19 citations81
US7084962B2Aug 1, 2006
Method for detecting positioning errors of circuit patterns during the transfer by means of a mask into layers of a substrate of a semiconductor wafer
INFINEON TECHNOLOGIES AG7 citations68
US7465522B2Dec 16, 2008
Photolithographic mask having half tone main features and perpendicular half tone assist features
INFINEON TECHNOLOGIES AG4 citations60
US7078133B2Jul 18, 2006
Photolithographic mask
INFINEON TECHNOLOGIES AG3 citations58