Inventor
SHIBUYA TATSUHIKO
JP8 patents
Patents
8 patentsUS5885654AMar 23, 1999
Polysilazane-based coating solution for interlayer insulation
TOKYO OHKA KOGYO CO LTD56 citations95
US6190788B1Feb 20, 2001
Method for the formation of a siliceous coating film
TOKYO OHKA KOGYO CO LTD17 citations91
US5614271AMar 25, 1997
Method for the formation of a silica-based coating film
TOKYO OHKA KOGYO CO LTD39 citations91
US6338868B1Jan 15, 2002
Method for the formation of a siliceous coating film
TOKYO OHKA KOGYO CO LTD15 citations83
US7135064B2Nov 14, 2006
Silica-based coating film on substrate and coating solution therefor
TOKYO OHKA KOGYO CO LTD8 citations72
US6875262B1Apr 5, 2005
Silica-based coating film on substrate and coating solution therefor
TOKYO OHKA KOGYO CO LTD11 citations72
US7060361B2Jun 13, 2006
Silica-based organic film and method of manufacturing the same, and base material comprising organic film
TOKYO OHKA KOGYO CO LTD3 citations62
US7235500B2Jun 26, 2007
Material for forming silica based film
TOKYO OHKA KOGYO CO LTD1 citations51