Inventor

HIRAHARA KOMEI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “HIRAHARA KOMEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO OHKA KOGYO CO LTD

5 patents

US7776510B2Aug 17, 2010

Resist composition, method of forming resist pattern, compound and acid generator

TOKYO OHKA KOGYO CO LTD14 citations83

US7488568B2Feb 10, 2009

Resist composition, method of forming resist pattern, compound and acid generator

TOKYO OHKA KOGYO CO LTD7 citations73

US7741009B2Jun 22, 2010

Positive resist composition and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD2 citations61

US7491485B2Feb 17, 2009

Resist composition and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD2 citations61

US7745098B2Jun 29, 2010

Polymer compound, positive resist composition and method of forming resist pattern

TOKYO OHKA KOGYO CO LTD0 citations51

ANDO TOMOYUKI

1 patent

US8236483B2Aug 7, 2012

Method of forming resist pattern

ANDO TOMOYUKI7 citations81