Inventor
KOVARSKY NICOLAY Y
US8 patents
Patents
8 patentsUS7704352B2Apr 27, 2010
High-aspect ratio anode and apparatus for high-speed electroplating on a solar cell substrate
APPLIED MATERIALS INC24 citations92
US7670465B2Mar 2, 2010
Anolyte for copper plating
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US7651934B2Jan 26, 2010
Process for electroless copper deposition
APPLIED MATERIALS INC25 citations92
US7128823B2Oct 31, 2006
Anolyte for copper plating
APPLIED MATERIALS INC16 citations92
US7935240B2May 3, 2011
Electroplating apparatus and method based on an array of anodes
APPLIED MATERIALS INC37 citations91
US7273535B2Sep 25, 2007
Insoluble anode with an auxiliary electrode
APPLIED MATERIALS INC7 citations70
US7837851B2Nov 23, 2010
In-situ profile measurement in an electroplating process
APPLIED MATERIALS INC6 citations61
US7736928B2Jun 15, 2010
Precision printing electroplating through plating mask on a solar cell substrate
APPLIED MATERIALS INC1 citations51