Inventor
HAYWOOD EDWARD L
US9 patents
⚠️ This page may combine multiple inventors who share the name “HAYWOOD EDWARD L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTERMOLECULAR INC
5 patentsUS8581318B1Nov 12, 2013
Enhanced non-noble electrode layers for DRAM capacitor cell
INTERMOLECULAR INC21 citations92
US8737036B2May 27, 2014
Titanium based high-K dielectric films
INTERMOLECULAR INC4 citations72
US8652927B2Feb 18, 2014
Integration of non-noble DRAM electrode
INTERMOLECULAR INC5 citations71
US8541828B2Sep 24, 2013
Methods for depositing high-K dielectrics
INTERMOLECULAR INC2 citations62
US9607904B2Mar 28, 2017
Atomic layer deposition of HfAlC as a metal gate workfunction material in MOS devices
INTERMOLECULAR INC0 citations39