Inventor
Ameen Mike
US3 patents
Patents
3 patentsUS10403503B2Sep 3, 2019
Wafer cooling system and method
AXCELIS TECH INC5 citations69
US9978599B2May 22, 2018
Wafer cooling apparatus and method
AXCELIS TECH INC2 citations69
US11756772B2Sep 12, 2023
System and method for extending a lifetime of an ion source for molecular carbon implants
AXCELIS TECH INC0 citations48