P

Inventor

JEN CAUSON KO-CHUAN

US9 patents
⚠️ This page may combine multiple inventors who share the name “JEN CAUSON KO-CHUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

5 patents
US9218941B2Dec 22, 2015

Ion implantation system and method with variable energy control

AXCELIS TECH INC4 citations72
US10403503B2Sep 3, 2019

Wafer cooling system and method

AXCELIS TECH INC5 citations69
US9978599B2May 22, 2018

Wafer cooling apparatus and method

AXCELIS TECH INC2 citations69
US11923169B2Mar 5, 2024

Apparatus and method for metal contamination control in an ion implantation system using charge stripping mechanism

AXCELIS TECH INC0 citations44
US9455116B2Sep 27, 2016

Angular scanning using angular energy filter

AXCELIS TECH INC0 citations36

APPLIED MATERIALS INC

1 patent
US6639227B1Oct 28, 2003

Apparatus and method for charged particle filtering and ion implantation

APPLIED MATERIALS INC81 citations95

ADVANCED ION BEAM TECH INC

1 patent
US9057129B2Jun 16, 2015

Implant method and implanter by using a variable aperture

ADVANCED ION BEAM TECH INC3 citations60

NIU HUAN

1 patent
US10799587B2Oct 13, 2020

Ion implantation of neutron capture elements into nanodiamond particles to form composition for neutron capture therapy usage

NIU HUAN1 citations49

WAN ZHIMIN

1 patent
US8669539B2Mar 11, 2014

Implant method and implanter by using a variable aperture

WAN ZHIMIN0 citations43