Inventor
SARAJLIC AJDIN
US4 patents
Patents
4 patentsUS10748738B1Aug 18, 2020
Ion source with tubular cathode
APPLIED MATERIALS INC4 citations69
US11424097B2Aug 23, 2022
Ion source with tubular cathode
APPLIED MATERIALS INC0 citations58
US11450504B2Sep 20, 2022
GeH4/Ar plasma chemistry for ion implant productivity enhancement
APPLIED MATERIALS INC0 citations54
US10923309B2Feb 16, 2021
GeH4/Ar plasma chemistry for ion implant productivity enhancement
APPLIED MATERIALS INC0 citations54