Inventor
HENDERSON JEFF P
US3 patents
Patents
3 patentsUS10092929B2Oct 9, 2018
Wafer tray sorter with door coupled to detector
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US9545724B2Jan 17, 2017
Tray engine with slide attached to an end effector base
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US11077466B2Aug 3, 2021
End effector with slides for transferring trays
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