Inventor
KWON BYUNG-IN
SG8 patents
⚠️ This page may combine multiple inventors who share the name “KWON BYUNG-IN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
XIA TAI XIN SEMICONDUCTOR QING DAO LTD
6 patentsUS11693307B2Jul 4, 2023
Reticle pod for preventing haze contamination and reticle stocker having the same
XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations59
US11605550B2Mar 14, 2023
Alignment system
XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations57
US11340523B2May 24, 2022
Correction method of photomask pattern
XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations57
US11079690B2Aug 3, 2021
Apparatus and method for processing a substrate using the same
XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations48
US11779871B2Oct 10, 2023
Exhaust module for wafer baking apparatus and wafer processing system having the same
XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations44
US11342184B2May 24, 2022
Method of forming multiple patterned layers on wafer and exposure apparatus thereof
XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations44