Inventor · disambiguated record
Sanjit Das
Also filed as: DAS SANJIT · DAS SANJIT K · DAS SANJIT KUMAR
8 granted patents·783 citations·filing 1997–2004
90Inventor score
Top patents by PatentIndex Score
8 records- 0196US6001730AChemical mechanical polishing (CMP) slurry for polishing copper interconnects which use tantalum-based barrier layersMOTOROLA INC·Filed 1997·Granted Dec 14, 1999·324 cites·32 claims
- 0295US5897375AChemical mechanical polishing (CMP) slurry for copper and method of use in integrated circuit manufactureMOTOROLA INC·Filed 1997·Granted Apr 27, 1999·338 cites·32 claims
- 0377US7009280B2Low-k interlevel dielectric layer (ILD)IBM·Filed 2004·Granted Mar 7, 2006·15 cites·17 claims
- 0472US6831363B2Structure and method for reducing thermo-mechanical stress in stacked viasIBM·Filed 2002·Granted Dec 14, 2004·18 cites·15 claims
- 0572US5882243AMethod for polishing a semiconductor wafer using dynamic controlMOTOROLA INC·Filed 1997·Granted Mar 16, 1999·34 cites·10 claims
- 0668US6071816AMethod of chemical mechanical planarization using a water rinse to prevent particle contaminationMOTOROLA INC·Filed 1997·Granted Jun 6, 2000·35 cites·27 claims
- 0761US6822472B1Detection of hard mask remaining on a surface of an insulating layerIBM·Filed 2003·Granted Nov 23, 2004·7 cites·20 claims
- 0846US5928962AProcess for forming a semiconductor deviceMOTOROLA INC·Filed 1998·Granted Jul 27, 1999·12 cites·23 claims
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