Inventor
HUSSEY JR JAMES H
US6 patents
Patents
6 patentsUS6245581B1Jun 12, 2001
Method and apparatus for control of critical dimension using feedback etch control
ADVANCED MICRO DEVICES INC204 citations97
US6728591B1Apr 27, 2004
Method and apparatus for run-to-run control of trench profiles
ADVANCED MICRO DEVICES INC37 citations91
US6734088B1May 11, 2004
Control of two-step gate etch process
ADVANCED MICRO DEVICES INC8 citations71
US5472774ADec 5, 1995
Photolithography test structure
ADVANCED MICRO DEVICES INC6 citations70
US5370923ADec 6, 1994
Photolithography test structure
ADVANCED MICRO DEVICES INC6 citations70
US6555397B1Apr 29, 2003
Dry isotropic removal of inorganic anti-reflective coating after poly gate etching
ADVANCED MICRO DEVICES INC4 citations61